Thermically-Initiated Fluorinations at Saturated Carbon Atoms with Xenon Difluoride
نویسندگان
چکیده
منابع مشابه
Rapid Sacrificial Germanium Etching Using Xenon Difluoride
We present a novel micromachining procedure employing the noble gas halide, xenon difluoride (XeF2), to rapidly undercut a sacrificial layer comprised of low-temperature deposited amorphous germanium (α-Ge). As a proof of concept, this process is utilized to fabricate electrostatically-actuated suspended Bragg mirrors applicable to wavelength-tunable surface-normal photonic devices. Exploiting ...
متن کاملFabrication of suspended dielectric mirror structures via xenon difluoride etching of an amorphous germanium sacrificial layer
The authors present a simplified fabrication method for the creation of free-standing dielectric mirrors for use in monolithic wavelength tunable surface-normal photonic devices, including vertical-cavity surface emitting lasers. This process utilizes a nonplasma dry etching process, based on the noble gas halide, xenon difluoride XeF2 , to remove an inorganic sacrificial film comprised of low-...
متن کاملSaturated absorption at nanowatt power levels using metastable xenon in a high-finesse optical cavity.
Strong saturated absorption at nanowatt power levels has been demonstrated using metastable xenon in a high finesse optical cavity. The use of metastable xenon allows a high quality factor of Q = 2 × 10(8) to be achieved at relatively high atomic densities without any contamination or damage to the optical surfaces, which is often a problem when using high-density rubidium or other alkali atoms...
متن کاملCarbon nanotube initiated formation of carbon nanoscrolls
The unique topology and exceptional properties of carbon nanoscrolls CNSs have inspired unconventional nanodevice concepts, yet the fabrication of CNSs remains rather challenging. Using molecular dynamics simulations, we demonstrate the spontaneous formation of a CNS from graphene on a substrate, initiated by a carbon nanotube CNT . The rolling of graphene into a CNS is modulated by the CNT siz...
متن کاملIn Situ Fabricated Microchannels Using Porous Polymer and Xenon Difluoride Etchant
A novel microfluidic fabrication technique which allows in situ formed silicon microchannels and does not necessitate substrate bonding is presented. A gas-permeable polymer membrane acts as the top surface of the microchannel, allowing xenon difluoride (XeF2) etchant to pass unobstructed to the silicon substrate. Exposed silicon areas on the wafer are then etched isotropically.
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Bulletin of the Chemical Society of Japan
سال: 1986
ISSN: 0009-2673,1348-0634
DOI: 10.1246/bcsj.59.1659